Efficient optical proximity correction based on semi-implicit additive operator splitting
نویسندگان
چکیده
منابع مشابه
On a new class of additive (splitting) operator-difference schemes
Many applied time-dependent problems are characterized by an additive representation of the problem operator. Additive schemes are constructed using such a splitting and associated with the transition to a new time level on the basis of the solution of more simple problems for the individual operators in the additive decomposition. We consider a new class of additive schemes for problems with a...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2019
ISSN: 1094-4087
DOI: 10.1364/oe.27.001520